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chemical mechanical polishing

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  • Chemical Mechanical Polishing — Chemisch mechanisches Polieren (CMP) (engl: chemical mechanical polishing, auch chemical mechanical planarization) ist ein Polierverfahren in der Waferbearbeitung um sehr dünne Schichten gleichmäßig abzutragen. Diese Methode wurde an US… …   Deutsch Wikipedia

  • Chemical-mechanical planarization — Chemical Mechanical Polishing/Planarization is a process of smoothing surfaces with the combination of chemical and mechanical forces. It can be thought of as a hybrid of chemical etching and free abrasive polishing. Contents 1 Description 2… …   Wikipedia

  • Polishing — is the process of creating a smooth and shiny surface by using rubbing or a chemical action, leaving a surface with significant specular reflection and minimal diffuse reflection. Imagine the surface magnified thousands of times, it usually looks …   Wikipedia

  • Mechanical plating — Mechanical plating, also known as peen plating, mechanical deposition, or impact plating, is a plating process that imparts the coating by cold welding fine metal particles to a workpiece. Mechanical galvanization is the same process, but applies …   Wikipedia

  • Direct bonding — describes a wafer bonding process without any additional intermediate layers. The bonding process is based on chemical bonds between two surfaces of any material possible meeting numerous requirements.[1] These requirements are specified for the… …   Wikipedia

  • Chemisch-mechanisches Polieren — Chemisch mechanisches Polieren, auch chemisch mechanisches Planarisieren (CMP, engl: chemical mechanical polishing, auch chemical mechanical planarization) ist ein Polierverfahren in der Waferbearbeitung um dünne Schichten gleichmäßig abzutragen …   Deutsch Wikipedia

  • Thin-film deposition — is any technique for depositing a thin film of material onto a substrate or onto previously deposited layers. Thin is a relative term, but most deposition techniques allow layer thickness to be controlled within a few tens of nanometers, and some …   Wikipedia

  • Thin film — A thin film is a layer of material ranging from fractions of a nanometer (monolayer) to several micrometers in thickness. Electronic semiconductor devices and optical coatings are the main applications benefiting from thin film construction. A… …   Wikipedia

  • Химико-механическая планаризация — Причина введения CMP: слева показан срез чип …   Википедия

  • Photolithography — For earlier uses of photolithography in printing, see Lithography. For the same process applied to metal, see Photochemical machining. Photolithography (or optical lithography ) is a process used in microfabrication to selectively remove parts of …   Wikipedia

  • Nikon — For other uses, see Nikon (disambiguation). Nikon Corporation 株式会社ニコン Type Public (TYO: 7731) Industry …   Wikipedia

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